Poster "mask optimization" Papers

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TokMan:Tokenize Manhattan Mask Optimization for Inverse Lithography

Yiwen Wu, Yuyang Chen, Ye Xia et al.

NeurIPS 2025poster

ILILT: Implicit Learning of Inverse Lithography Technologies

Haoyu Yang, Mark Ren

ICML 2024posterarXiv:2405.03574