by Hao GENG Papers

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LithoSim: A Large, Holistic Lithography Simulation Benchmark for AI-Driven Semiconductor Manufacturing

Hongquan He, Zhen Wang, Jingya Wang et al.

NeurIPS 2025poster

TokMan:Tokenize Manhattan Mask Optimization for Inverse Lithography

Yiwen Wu, Yuyang Chen, Ye Xia et al.

NeurIPS 2025poster